Kinetic Processes and Phase-transition of CVD Processes for Ti2SiC3
نویسندگان
چکیده
Abstract In this paper we present a kinetic model based on numerical simulations of a chemical vapor deposition (CVD) process. We discuss a model that is based on kinetics of the deposition rates to the material. Such a kinetic model helps to explain the experimental results and reduce expensive real-life studies. We concentrate on experiments with 3 2 Ti SiC and we verify our model based on temperature dependent kinetic processes.
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ورودعنوان ژورنال:
- JCIT
دوره 5 شماره
صفحات -
تاریخ انتشار 2010